Defects In Microelectronic Materials And Devices - Taylor & Francis Ltd

Uncover The Defects That Compromise Performance And Reliability As Microelectronics Features And Devices Become Smaller And More Complex, It Is Critical That Engineers And Technologists Completely Understand How Components Can Be Damaged During The Increasingly Complicated Fabrication Processes Required To Produce Them. A Comprehensive Survey Of Defects That Occur In Silicon-based Metal-oxide Semiconductor Field-effect Transistor (mosfet) Technologies, This Book Also Discusses Flaws In Linear Bipolar Technologies, Silicon Carbide-based Devices, And Gallium Arsenide Materials And Devices. These Defects Can Profoundly Affect The Yield, Performance, Long-term Reliability, And Radiation Response Of Microelectronic Devices And Integrated Circuits (ics).